YPSILANTI – NanoGetters has installed new tooling for their high-volume production deposition system for 8/200mm diameter wafers, increasing the capacity and throughput at NanoGetters for these larger diameter wafers.
“Adding this new equipment enables NanoGetters to serve the MEMS community as they transition to larger diameter wafers,” said Doug Sparks, President of NanoGetters. “More and more MEMS devices are incorporating thin film getters to improve the vacuum quality of their devices. Getters are being used in RF-MEMS resonators, gyroscopes, pressure sensors, IR sensors, displays, accelerometers and chemical concentration sensors. As larger market opportunities emerge, NanoGetters will be there to provide better vacuum packaging solutions for our customers.”
Nanogetter is a subsidiary of ISSYS and is an ITAR compliant, AS9102 qualified supplier for the aerospace industry. ISSYS is a leader in advanced MEMS technologies for industrial, medical devices, microfluidic and scientific analytical sensing applications.
Founded in 1995, ISSYS is one of the oldest independent MEMS companies in the US. ISSYS operates a “full manufacturing under one roof,” multi-million-dollar, state-of-the-art MEMS fabrication facility in Yspilanti. An ISO 9001:2000 certified organization, ISSYS is a vertically integrated company dedicated to developing and manufacturing system-level products based on MEMS technology.
For more information, click on Mems-ISSYS.Com
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